KeyAssets.com | Item 6306

Chemical Mech. Polishing (CMP)

Item 6306

Manufacturer:

Applied Materials

Equipment:

CMP - STI SOD

Current Offer:

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Model No.:

Mirra 3400

Asking Price:

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Wafer/Mask:

200mm

Market Type:

Exchange

Vintage:

1999

Start Date:

28/May/08

Serial No.:

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Expiration:

Exchange

Lead Time:

2 weeks ARO

Location:

Asia

Warranty:

As Is

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Condition:

( R-2 ) De-installed, not in crate, system complete

Photos & Files:

BBEM Datasheet

Main Pic

Internal Pic

Controllers

Pumps

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Description:

Wafer Diameter--200 mm
Vendor Tool Serial
Year--1999
Operational Status--Operational
OEM--APPLIED MATERIALS
Tool Model—Mirra 3400
Process--STI / SOD
Software Version--PS58j0
System Power Rating--208 VAC 3-Phase
Loading Configuration--4 Wet Stage Loaders

Process Configuration Description
Chemicals / Gases Used
Position 1-Platen 1 slurry POUs-Slurry/DIW/Hi-PHDIW
Position 2-Platen 2 slurry POUs-Slurry/DIW/Hi-PHDIW
Position 3-Platen 3 slurry POUs-Slurry/DIW/Hi-PHDIW

Polisher Controller--1
Main Polisher consisting of
Platen assembly--3
Pad con assembly--3
Slurry distribution motor and arm assembly--3
Polishing heads unit in Profiler UPA config--4
Head Cleaning Loading & Unloading Unit (HCLU)--1
Cassette tub to house four sets of loaders--1
Robot Arm Assembly--1

Computer Rack consisting of
FE & BE computer--2
Nova controller--1
Xenon Light Bulb unit--1
Nova FE Computer—1

Remote Kit
Barnant Pump assembly kit (For both Slurry A&B at P1&P2 delivery)--4

Metrology Tools
Nova CU--1
Nova MU--1
Nova Xenon Unit--1
Nova Light Bulb Housing Unit--1
Nova FE Computer--1
Nova Pneumatic Control Box--1

Improvement Project Kits
Slurry motor rotation detection kit--1
Local Slurry drum Sensor--2
HCLU Sprayer--1
Cassette Tub Limit Switch--1
WLS Sensor Cover--4
Vacuum Pencil holder--1
Air Gun Sprayer with holder--1

Features:

Forum:

Q: Can you sell this tool without cleaner?
If possible, we'd like to receive a quatation.

A: Yes. the Mirra is sold without the wafer cleaner. The Price is $950k Please cal Keyassets for additional info.or to make an offer.

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email: inform@keyassets.com phone: (925)388-6180 fax: (925)736-6179

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