My Equipment ... Post A Want Ad ... Post Equipment ... Transaction Rules Transaction Chart		Diffusion & Oxidation Item 6300 Manufacturer: TEL (Tokyo Electron Ltd) Equipment: Diffusion Furnace - TEOS Current Offer: login Model No.: Alpha - 8S Asking Price: login Wafer/Mask: 200mm Market Type: Exchange Vintage: 1997 Start Date: 28/May/08 Serial No.: login Expiration: Exchange Lead Time: 2 weeks ARO Location: Asia Warranty: As Is           Email this item to a friend. Condition: ( R-2 ) De-installed, not in crate, system complete Photos & Files: BBEM Datasheet System in Fab System Pic - Back System Pic-Internal Ask the seller a question about this tool. Description: Tokyo Electron Alpha 8s Wafer Diameter--200 mm Vendor Tool Serial Year--1997 Operational Status--Operational OEM--Tokyo Electron Tool Model--Alpha 8s Machine Orientation--LL Process—TEOS Heater--VMM-40-101 Software Version--TS-4000 CPU-M – Board V07.02 R0000 CPU-P – Board V07.02 R0000 CPU-T – Board V07.06 R0057 CPU-S – Board V46.01 R1004 CPU-I/O (P) V01.23 RP22524-1 CPU-I/O (T) V07.03 R0007 System Power Rating--110 VAC One Phase / 208 AC Loading Configuration--6 Loader Main System--1 TS4000 Controller Photohelic Gauge Boat Elevator Wafer Load Automation 16 Cassette Stocker Temperature Controller (M121) Furnace Monitor, Power Control Unit Remote Utility & Gas Cabinet Inner T/C for Ration Mix HCl Detector Auto Shutter Gas System (O2, N2, TEOS ) Options--1 (1) Signal Tower (2) Pitch Change Mechanism (3) UPS (4) GEM Communication N2 Load Lock Ambient Control Option--1 Quartzware Load size 150 wafers Load lock purge system Process gas O2, N2, TEOS Gas Type - Convention Gas System Tubing material - Stainless steel Tubing Finish - Electro-polish Manual valve - Fujikin Fitting Type - VCR/UJR Air-Operated valve - Fujikin Filter - Millipore Regulator - Veriflo MFC - Aera Pressure transducer - Millipore or NAGANO Features: Forum:
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